Characterizing the electrical properties of raised S/D junctionless thin-film transistors with a dual-gate structure

نویسندگان

  • Ya-Chi Cheng
  • Hung-Bin Chen
  • Jun-Ji Su
  • Chi-Shen Shao
  • Cheng-Ping Wang
  • Chun-Yen Chang
  • Yung-Chun Wu
چکیده

This letter demonstrates a p-type raised source-and-drain (raised S/D) junctionless thin-film transistors (JL-TFTs) with a dual-gate structure. The raised S/D structure provides a high saturation current (>1 μA/μm). The subthreshold swing (SS) is 100 mV/decade and the drain-induced barrier lowering (DIBL) is 0.8 mV/V, and the I on/I off current ratio is over 10(8) A/A for L g = 1 μm. Using a thin channel structure obtains excellent performance in the raised S/D structure. Besides the basic electrical characteristics, the dual-gate structure can also be used to adjust V th in multi-V th circuit designs. This study examines the feasibility of using JL-TFTs in future three-dimensional (3D) layer-to-layer stacked high-density device applications.

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عنوان ژورنال:

دوره 9  شماره 

صفحات  -

تاریخ انتشار 2014